ICDS

Ultra miniaturized InterDigitated electrodes platform for sensing applications

1 min read · Sun, Mar 15 2020

Comsol Multiphysics Circuits IDEs ICDS

Z. Wang, et al., "Ultra miniaturized InterDigitated electrodes platform for sensing applications." Microelectronic Engineering 225, 2020, 111253. InterDigitated Electrodes (IDEs) is a generic platform for a wide range of diverse applications with their implementation in sensing modules being a major one. We propose the use of IDCs with deep sub-micron critical dimension; equally spaced electrodes of 200 nm width for enhanced sensing performance and also the method of fabrication thereof. The transducer configuration was studied theoretically with a finite element method simulation by using